Model: DLC (Diamond Like Coating) Manufacturer: Bakma Serial #: Location: Huntington Park, CA Year Built: 2002
Specifications
Plasma Enhanced Chemical Vapor Deposition Type: Diamond Like Coating Chamber Size (L x W x H): : 38" x 38" x 38" Chamber Type: High Vacuum Ion Source Capacity: 2 Design Gas Usage: Argon (Ar) and Methane (CH4)
Equipped with
(1) Advanced Energy Pinnacle Plus 5kW DC RF Plasma Generator, M/N# 3152435-102L (SN# 285630)
(2) MKS Mass Flow Controllers
(2) MKS PR4000 Digital Power Supply/Readouts
(1) Control Cabinet with (4) Digital Display Chamber Process Controllers
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